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Miniaturized Fast Steering Mirror Platforms (FSM) for Laser Beam Control are Piezo-based

 

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PI Small, Fast Tip/Tilt Platforms

PI (Physik Instrumente), leader in the field of piezo technology and precision motion systems and solutions, broadens its portfolio of piezo steering mirrors. With milli-second response and settling time and high dynamic linearity, the new S-335 fast steering mirror (FSM) platforms are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

2-Axis, Frictionless Guiding, No Polarization Rotation
S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.

Read Tech Article, Advances in Piezo Mechanics Aid Eye Surgery

Long Ranges with Integrated Motion Amplifier
Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.

Watch the Refractive Eye Surgery Animation

Specifications, Datasheet, More Information

Standard and Custom
PI has over 4 decades of experience providing in-house engineered precision motion control solutions, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the customer’s application.

 

About PI


PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.

 

PI (Physik Instrumente) L.P.
16 Albert Street
Auburn , MA 01501
United States

Map for PI (Physik Instrumente) L.P. in Auburn MA US



PI is a leading manufacturer of precision motion control equipment , piezo motors, air bearing stages and hexapod …
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