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AGV-SPO Single Pivot-Point Galvanometer

 

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AGV-SPO Single Pivot-Point Galvanometer
  • Larger field of view than traditional 2D scanners simplifies the processing of larger parts
  • Minimal spot distortion over the entire field of view minimizes processing variation for the highest quality laser-processed parts
  • Air and water cooling options provide thermal stability and improve long-term accuracy
  • Broad selection of mirror surface treatments support a variety of laser wavelengths

Aerotech’s AGV-SPO single pivot-point galvanometer scanner enables a larger field of view and reduced spot distortion for critical laser micromachining applications. A unique optical design effectively controls the beam entrance pupil to be coincident for the X and Y scanner motion, increasing the effective numerical aperture of the scanner system. This design directly enables a larger field of view for a given focal length and reduces spot distortion over the entire working area. These advantages allow the AGV-SPO to process larger parts faster and with greater consistency.

The AGV-SPO is available with a selection of optical coatings and focusing optics to support a variety of commonly-used laser wavelengths and focal lengths. Customized optics and optical mounting features are available upon request. The AGV-SPO can be configured with active cooling features such as air-cooled mirrors, water-cooled motors, or both to preserve working-plane accuracy in the presence of thermal disturbances caused by the laser and aggressive motion profiles.

The AGV-SPO utilizes Aerotech’s advanced motion and Position Synchronized Output (PSO) capabilities. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel range of the servo stages. This eliminates stitching errors that can occur in a more traditional move-expose-repeat process.

AGV-14-SPO Dimensions

Mechanical Specifications

Model AGV14SPO
Optical Performance
Beam Aperture 14 mm
Maximum Scan Angle ±20°
Beam Displacement 35 mm
Dither (Min. Incremental Motion)(2) 0.3 µradRMS
Accuracy 50 µrad pk-pk
Repeatability(3) 0.6 µradRMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration(4,5) 60,000 m/s2
Continuous Acceleration(4, 6) 20,000 m/s2
Positioning Speed(4) 50 m/s
Processing Speed(4, 7, 8) 5 m/s5
Jump & Settle Time, 1 mm Move(4, 9) 700 µsec
Stability
Long-Term Drift Offset 10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift Offset 20 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Weight 5.1 kg
Material Aluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure) 20,000

Notes:
1. All angles are optical unless otherwise specified
2. Without air cooling option
3. After initial 3-hour warm-up, ambient temperature variation < ±0.5 deg
4. Typical performance with f = 160mm F-Theta objective
5. Based on maximum rated current of the motor
6. Based on rated rms current of the motor with water cooling option; maximum continuous acceleration is 70% of this value without water cooling
7. Achievable with <1% velocity error over continuous velocity portion of move
8. Marking speed is dependent on allowable tracking error
9. Settled to within 1% of move distance
10. All specifications are per axis unless otherwise noted

Electrical Specifications

Model AGV14SPO
Drive System Brushless Direct-Drive Galvano Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches Optical Limit Switches and Software Limits
Home Switch At Center

 

Aerotech, Inc
101 Zeta Drive
Pittsburgh , PA 15238-2897
United States


Since 1970, Aerotech has designed and manufactured the highest performance motion control and positioning systems for our …
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