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Product ReleaseMicroE Systems' Mercury™ 1500V for Motion Control in Vacuum Rated Semiconductor Processing Applications
MicroE Systems offers the MercuryTM 1500V (M1500V) digital output vacuum rated encoder for motion control applications. The smallest high-performance digital output encoder available, it is rated to1E-8 torr. The sensor is vented, constructed with vacuum compatible materials, rated for 48 hour bake out at 150°C and works with both linear and rotary glass scales. The small size and affordable price of the Mercury 1500V will reduce the cost and size of motion platform designs, while significantly improving their performance. Available resolutions range from 5µm to 0.50µm linear, or 6,600 CPR to 655,000 CPR rotary. Specify the factory-set interpolation level of x4, x8, x20, or x40 when placing your order. A-Quad-B and bi-directional index window digital outputs are produced directly from the sensor that measures just 8.4mm tall, weighing just 2.7g. This low Z-Height sensor makes the M1500V kit encoder ideal for motion platform designs used in semiconductor processing equipment, electron microscopy, and other demanding vacuum-rated applications. Broad alignment tolerances make Mercury encoder sensors the easiest to align in the industry. With an alignment tolerance of ± 2 degrees, the sensor can be aligned in 30 seconds or less without instrumentation. The entire system is EMI shielded against electrical noise for use in PWM/EMI noise environments and is supplied with flying leads for customer termination at the vacuum wall.
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Optical Encoder - Mercury II High-Performance Motion-Feedback Encoder
![]() The Mercury II sensor works with metal tape and glass linear and glass rotary scales MicroE Systems has just introduced Mercury II, the most advanced motion feedback encoder family in history. No other encoder in its class surpasses Mercury II for performance, versatility or ease of use. Four models are currently available with programmable resolutions ranging from 5µm to 1.2nm, linear or 20k CPR to 268M CPR rotary. ...More >> MicroE Systems Offers Custom Glass Scales for Mercury Encoder Models - Linear, Rotary and Rotary Segment Scales Available MicroE Systems announces customization services for application-specific encoder scales including rotary, rotary segment and linear scales. Compatible with Mercury™ encoders, these chrome-on-glass scales provide superior accuracy and excellent thermal stability. All scales include an optical index that may be specified by the customer.
Custom large-ID rotary glass scales can be manufactured with ID's up to 254mm, special OD's up to 304.8mm for a maximum resolution of 176M CPR. Other options include an index mark outside the main track, and special low CTE materials. MicroE Systems also provides services for centering and mounting of hubs to rotary scales. Hubs may be supplied by the customer or manufactured to customer specifications by MicroE Systems.
For Mercury™ encoder applications that only need a small angular range, segment scales are a low-inertia, space saving alternative. Rotary segments can be manufactured with any angle range plus a wide selection of radius values.
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Optical Encoder - MicroE SYSTEMS Optical Encoder Product Guide
![]() Provides Comparison and Specifications for the Mercury Encoder Family - Encoder Technology Product Guide is Available FREE A new product guide that provides an overview of four product families and 15 models of compact optical encoders which are ideally suited for use in closed-loop motion control systems is being offered by MicroE Systems of Natick, Massachusetts. The guide also describes the patented sensor technology, SmartSignal electronics, SmartSignal encoder software. The Mercury™ Encoder Technology Product Guide describes four families ...More >> MicroE Systems has World's Fastest High Resolution Encoder ![]() The new Mercury™ 3500Si is the first high performance position feedback encoder to operate at maximum speed and maximum resolution. Utilizing the industry-standard SPI serial data interface, the Mercury™ 3500Si can achieve speeds of 7.2 meters/second, while operating at 5 nanometer resolution. The system is capable of speeds up to 50 times faster than standard A-quad-B output encoders. The SPI standard is supported by many DSP chip manufacturers including: TI, Motorola and Analog Devices. Encoder position values are digitized and sent directly into the controller's DSP. This format provides a robust connection that is ideal for encoder interfacing. Like other Mercury™ encoders, the 3500Si is miniaturized. It has the smallest high-performance sensor head in the industry, just 8.4mm tall. ...More >> MicroE Systems' Mercury™ 3000Si Dual Axis Averager Delivers Unsurpassed Accuracy in Rotary Applications
MicroE Systems has announced a programmable Dual Axis Averager for rotary applications requiring the highest position accuracy at high operating speeds. Mercury™ 3000Si Dual Axis Averager is comprised of two 8.4mm tall high-performance Mercury™ encoder sensors, a SmartSignal™ dual-interpolator module and a rotary glass scale. The system eliminates eccentricity errors through an advanced signal-averaging algorithm. Processing and programmable interpolation to x1024 occur within the unit's FPGA. The high-speed serial word interface allows operation at maximum resolution and maximum rotational speed: up to 16.8M CPR (0.08 arc-sec) at 1300 RPM. This is many times faster than standard A-quad-B output. The bi-directional optical index signal is repeatable to the encoder's resolution. The ... ...More >> MicroE Systems Offers Technical Bulletin On the Proper Cable Termination Using the 422 Data Transmission Standard The 422 data transmission standard is designed for transmitting digital data over long distances with very good noise immunity, as required for reliable implementation of encoders in motion control systems. In this Tech Note, engineers are provided with detailed guidelines and examples for the proper termination of cables when implementing the 422 data transmission standard. Four different termination techniques will be discussed in this report: No Termination, Series Termination, Parallel Termination and AC. Tradeoffs between signal quality, data speed and power dissipation are identified.The role of cable termination in any data transmission scheme is to ensure reliable transmission even when electromagnetic interference is present. This is accomplished by eliminating or minimizing s... ...More >> MicroE Systems Offers Design Guide for Creating Custom Linear, Rotary, and Segment Scales MicroE Systems announces the availability of a comprehensive design guide for the creation of custom glass scales for OEM applications. The document summarizes MicroE Systems’ standard linear, rotary and segment scales and illustrates how standard products may be modified. In addition, the guide provides the necessary information to for full-custom scale design.The guide illustrates how the inside diameter of standard rotary scales can be made larger. It provides guidelines for custom linear scales, custom rotary scales and custom segment scales. It provides calculations for determining the optical diameter of a rotary scale based on the required counts per revolution. Finally, for applications that require a small angular range, the design guide illustrates how to develop segment scal... ...More >> Rotary Encoder - MicroE Systems Offers Mercury™ Encoder Installation Kits
MicroE Systems announces the availability of four Mercury™ encoder installation kits. These kits are ideal for use with evaluation units or for installing limited quantities of Mercury encoders. Designed to expedite the cleaning, mounting and sensor alignment procedures, these installation kits save time and add convenience by providing all necessary supplies.
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MicroE Systems Offers Custom Glass Scales for Mercury™ Encoder Models - Linear, Rotary and Rotary Segment Scales Available MicroE Systems announces customization services for application-specific encoder scales including rotary, rotary segment and linear scales. Compatible with Mercury™ encoders, these chrome-on-glass scales provide superior accuracy and excellent thermal stability. All scales include an optical index that may be specified by the customer. Custom large-ID rotary glass scales can be manufactured with ID's up to 254mm, special OD's up to 304.8mm for a maximum resolution of 176M CPR. Other options include an index mark outside the main track, and special low CTE materials. MicroE Systems also provides services for centering and mounting of hubs to rotary scales. Hubs may be supplied by the customer or manufactured to customer specifications by MicroE Systems. For Mercury™ encoder applicat... ...More >> MicroE Systems’ New 50 Nanometer Resolution Motion Feedback Encoder - Smallest Sensor, includes 1 LSB Optical Index, All Electronics in Sensor MicroE Systems announces the Mercury™ 1800 (M1800) digital kit encoder. The world’s smallest optical encoder to provide 50 nanometer resolution from the sensor, it measures just 8.9mm tall. The M1800 is available in two resolutions: 50 or 100 nanometers, linear, or up to 6.5 million CPR, rotary. All electronics are inside the sensor making the M1800 ideal for high-noise, industrial applications. This encoder’s high resolution minimizes cogging for smooth motion control, while its exclusive 1-LSB optical index, which is integrated into the scale, allows unsurpassed system repeatability and ease of setup. With the M1800, a motion system can achieve startup and recovery at full encoder resolution. When sensor size and performance are taken together, engineers can achieve significant space sav...
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MicroE SYSTEMS' Miniature Vacuum Encoder Systems Enable Compact, High Performance Equipment Designs: Programmable and Analog Model Encoders MicroE Systems has introduced five miniature vacuum-compatible motion feedback encoders to its family of high performance Mercury™ kit encoders. The sensors measure 8.4mm tall, 1/3 the height of competitive sensors, and are ideal for space-restricted designs. Importantly, one sensor operates in both linear and rotary applications. Available models include the M3500V programmable encoder with resolution to 5 nanometers. It features RS 422 compatible quadrature output, programmable resolution and output frequency, plus alignment and setup in under 30 seconds using integral LED indicators. The M1000V, an analog output encoder, provides sine/cosine output for use with your interpolation electronics. The SmartSignal™ alignment tool is used with the M1000V for alignment and setup procedures. All...
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MicroE Systems Offers the World’s Fastest High Resolution Encoder - The Mercury™ 3500Si is Up to 50 Times Faster Than Conventional Devices The new Mercury™ 3500Si is the first high performance position feedback encoder to operate at maximum speed and maximum resolution. Utilizing the industry-standard SPI serial data interface, the Mercury™ 3500Si can achieve speeds of 7.2 meters/second, while operating at 5 nanometer resolution. The system is capable of speeds up to 50 times faster than standard A-quad-B output encoders.The SPI standard is supported by many DSP chip manufacturers including: TI, Motorola and Analog Devices. Encoder position values are digitized and sent directly into the controller's DSP. This format provides a robust connection that is ideal for encoder interfacing. Like other Mercury™ encoders, the 3500Si is miniaturized. It has the smallest high-performance sensor head in the industry, just 8.4mm ta... ...More >> MicroE Systems Offers the Worlds Smallest Digital-in-the-Sensor Motion-Feedback Encoder, Mercury™ 1500 MicroE Systems has just introduced the Mercury™ 1500. This low cost digital output kit encoder has all signal conditioning and interpolation electronics within the sensor head. The system provides quadrature output at the sensor, making it ideal for high noise environments. Just 8.4mm tall, the M1500 is the world’s smallest digital encoder. Four interpolation values are available: x4, x8, x20, and x40. Equivalent resolution ranges are from 5µm to 0.50µm, linear, 10,000 Counts Per Rev. to 655,000 CPR, rotary. Two styles are available, the M1500S is configured with an RS-422 compliant 15 pin standard D-sub connector, the M1500H, is configured with an RS-422 compatible 5x2 micro-connector for tight spaces.The entire Mercury 1500S encoder is EMI shielded for use in the toughest environment... ...More >> MicroE Systems Introduces 10 Programmable Encoders to the Mercury Encoder Family MicroE Systems announces its line of Mercury™ SmartSignal™ programmable encoders. Designed to give engineers optimal motion system flexibility, Mercury™ programmable encoders enable fine-tuning of the motion loop by allowing encoder resolution to be set in integer steps from x4 to x4096. Maximum linear resolution is 5 nanometers; maximum rotary resolution is 67.1 million counts per revolution. Output is A-quad-B and high speed serial word. Mercury™ encoders also provide programmable alarms, programmable output bandwidth up to 28.8 million quadrature states per second, programmable alarm thresholds, and diagnostics. There are ten models of varying resolution including vacuum-compatible styles. All models have miniature sensor heads measuring just 8.4mm tall and work in both linear and rotar...
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MicroE SYSTEMS ChipEncoder™ Product Guide Provides Applications and Specifications for MicroE Systems Optical ChipEncoder™
The new product guide provides an overview of the revolutionary ChipEncoder, a complete motion-feedback system on a chip. Included in the brochure are general application ideas, system specifications, mounting options, and ordering information. The ChipEncoder is a miniature motion feedback device that was designed for low-cost, high-volume, high-performance applications with tight space restrictions. The system uses diffractive optical technology to provide rotary resolutions from 3,300 to 160,000 counts-per-revolution and linear resolutions from 100 to 1,000 counts-per-millimeter. The ChipEncoder measures only 6mm square x 4mm high and is compatible with SMT PC board assembly processes. It requires no alignment after assembly. The smallest optical encoder kit available, this tiny, PC... ...More >> MicroE Systems Offers the ChipEncoder - Unique Miniature Encoder Eliminates the Tradeoff between Small Size, Low Cost and High Performance in High-Volume Motion-Control Applications The ChipEncoder™ is a low-cost optical encoder that outperforms all optical and magnetic encoders in its class, achieving precise, closed-loop motion control. The ChipEncoder™ uses diffractive optical technology to provide rotary resolutions from 3,300 to 160,000 counts-per-revolution and linear resolutions from 100 to 1,000 counts-per-millimeter. Measuring only 6mm square x 4mm high, it is designed for high-volume applications and is compatible with SMT PC board assembly processes. It requires no alignment after assembly.The smallest optical encoder kit available, this tiny, PCB-mount device has three-channel output which includes a reference mark. As an optical encoder, it exhibits zero wear, backlash, and hysteresis. The ChipEncoder™ can replace packaged encoders in many applicatio... ...More >> MicroE SYSTEMS, INC Introduces the World's Smallest High Performance Position Sensing Encoders: The Mercury Encoder Family with 15 Models The new Mercury™ family is a revolution in position encoder technology. It features the smallest and lightest high-performance sensor, measuring just 8.4mm tall and weighing only 5 grams. Other features include operating speeds at up to 7.2 meters/second at full resolution, programmable resolution, instrument-free alignment, and SmartSignal™ software. The Mercury™ encoder family contains 15 models in four styles: programmable, digital, analog, and vacuum. Linear resolutions range from 5 microns to 5 nanometers; rotary resolution ranges from 6,600 counts per rev. (CPR) to 67.1 million CPR. Additionally, the same sensor works in both linear and rotary applications. Contact the company for OEM pricing and availability.The Mercury™ family addresses the trend toward ... ...More >> |
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