Steinmeyer, Inc. offers a range of precision, high performance stages suitable for ultra high vacuum applications. The model MT105-LM-HV is one example. Shown is a compact, two axis (XZ) version with travel range choice of 30 or 50 mm. Positioning accuracy is 3 microns with repeatability of +/- 0.2 micron. This product can be provided as a classic XY stage without adapter plate and can also be configured as a XYZ system. Driven by a piezo motor each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high stiffness aluminum. All other components and hardware are selected for ultra high vacuum use (10E-10 torr).

Exhibiting both high precision and outstanding dynamic performance, these stages are ideal for demanding positioning applications in ultra high vacuum including:
– Scanning Electron Microscopy – E-Beam Processing – Particle Accelerators

Steinmeyer FMD has designed and shipped many multi-axis systems compatible with very high vacuum and clean room requirements as well! All vacuum stages are clean room assembled with components chosen for low out-gassing properties as well as low CVCM.