ALIO's patent pending NANO ZTM is a novel air bearing lift stage with TRUE NANO POSITIONING TM. The NANO Z TM lift stages was designed with a large open center , linear servo motors and variable counterbalance to exceed applications precision needs such as wafer inspection where heavy ceramic wafer plates need electrical and vacuum lines to the bottom of the plate for functionality. Other applications such as TRUE NANO TM metrology, optical inspection and laser machining are performed at accuracies of less than 100 nm without the fear of ballscrew thermal growth or wedge lifts tip and tilt and non repeatability and inaccuracies of other legacy designs.
The NANO Z TM novel design almost eliminates pitch, yaw and roll over the 24 mm travel range with less than 90 nm of repeatability in the standard unit. Optional extreme precision Nano Z TM will deliver 10 nm of repeatability with less than 50 nm of accuracy.
The NANO Z TM footprint is optimized due to the novel airbearing and linear motor design thus it can easily sit on top or inverted on an XY motion system for metrology or processing without increasing the motion systems overall vertical footprint or needing special mounting that legacy designed Z lifts with motors and screw which need 4 times the vertical distance.
When your application needs TRUE NANO POSITIONING TM contact ALIO first. Do not get fooled by other companies who talk about resolution instead of TRUE NANO TM repeatability or accuracy. TRUE NANO POSITIONING TM is a six degree of freedom measurement with NIST traceable metrology data.
ALIO Industries has been dedicated to producing the most advanced precision products and systems with highest quality in the world for the past 10 years. We are a TRUE NANO POSITIONING
TM
Motion Systems Solutions Company.